AGEM Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance. The standalone system includes the bubbler vessel, optional chiller and system controller in a small footprint. The facilities connections, carrier gas and process lines can be configured from multiple sides to fit into tight space
The Vapor Delivery System is designed to distribute chemical vapor via a carrier gas. The bubbler vessel is filled with the liquid chemical. Feedback from an active linear level sensor is used to maintain the vessel at the configurable set point level. The carrier gas is bubbled through the vessel using a sparge diffuser to maximize the vapor saturation. A temperature probe and optional integrated chiller maintain the chemical at a user configured set point to maximize process control.
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