valve manifold boxes (VMBs)

Features & Benefits:

Inert, toxic and hazardous gases; manual, semi-auto and fully automatic with a touch-screen interface in Cabinet or panel mount
AGEM 8 individual UHP gas sticks in a compact enclosure
Straight-through valve design improves gas flow and reduces internal volume
Optional vent with vacuum generator; N2 purge for efficient and safe purging of hazardous gases
ESO or stick shutdown capability for individual tool control
SEMI-S2 compliant

Valve Manifold Box

The AGEM Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system. The VMB can include up to eight individual sticks distributing gas from a single supply line. An optional integrated vacuum generator and N2 purge provide a safe and eff ective means of purging the lines for service. The VMB system can be configured for a fully automatic system, a semi-automatic system or a fully manual system with ESO capability.

Controller Options

Manual push-button
Up to 8-stick semi-auto
Up to 4-stick auto
Up to 8-stick auto

VMB Features

UV/IR sensor
Temperature switch
Door interlocks
Remote shutdown relays

EMO
Sprinklers
Toxic monitors

Optional VMB Accessories

Door/Window Sensors: Provide programmable alarm if door or window is opened
Toxic Monitor: Monitors enclosure continuously for any sign of toxic leak
Fire Sensors: Standard temperature switch or optional UV/IR or dual IR sensors
Panel Heater for LVP gases

valve manifold boxes (VMBs)

Features & Benefits:

Valve Manifold Box

Controller Options

VMB Features

Optional VMB Accessories

For further information contact AGEM for customize requirement.

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