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ALD Precursor / MO Source
ALD Precursor / MO Source
Semiconductor Gases
trimethylsilane (3MS)
monomethylsilane (MMS)
sulfur dioxide (SO₂)
boron trichloride (BCl₃)
boron trifluoride (BF₃)
ethylene (C₂H₄)
C₃F₈
C₄F₈
C₂F₆
C₄F₆
CF₄
CH₂F₂
CH₃F
CHF₃
HBr
HCl
HF
Gas / Chemical Delivery System
Project EPC
Isotopes
Deuterium (D₂)
Analytical Service
ICP-MS
GC-TCD
GC-PDHID
FTIR
Ion Chromatography IC
GC/MS
Moisture analyzer
Differential scanning calorimeter DSC
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Analytical Service
GC-TCD
GC-TCD
Analysis of gas concentration from % to 500ppm
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